Helium(He), Argon(Ar), Hydrogen(H2), Nitrogen(N2), Oxygen(O2), Carbon Dioxide(CO2), Carbon Monoxide(CO), Sulphur Dioxide(SO2), Nitrogen Monoxide(NO), Nitrogen Dioxide(NO2), Nitros Oxide(N2O), Neon(Ne), Krypton(Kr), Xenon(Xe), Hydrogen Sulfide(H2S), Liquid Chlorine(Cl2), Ammonia(NH3), Sulphur Hexafluoride(SF6), Synthetic Air, Zero Point Air
Helium (He) 99.995% TCH4≤1 CO2≤1 Ne≤10 H2≤3 CO≤1 H2O≤10 99.999% O2≤1 TCH4≤1 CO2≤0.5 Ne≤4 H2≤1 CO≤0.5 H2O≤1 99.9995%O2≤0.5 TCH4≤0.1 CO2≤0.2 Ne≤1 H2≤0.1 CO≤0.1 H2O≤1
Argon (Ar) 99.99% O2≤10 THC≤10 N2≤50 H2≤5 H2O≤15 99.999% O2≤2 THC≤2 N2≤5 H2≤1 H2O≤4 99.9995% O2≤1 THC≤0.5 N2≤2 H2≤0.5 H2O≤1
Hydrogen (H2) 99.99% O2≤5 CO2≤5 N2≤60 TCH4≤10 CO≤5 H2O≤5 99.999% O2≤1 CO2≤1 N2≤5 TCH4≤1 CO≤3 H2O≤1
Nitrogen (N2) 99.99% O2≤50 CO2≤10 N2≤10 CO≤5 H2O≤15 CH4≤30 99.999% O2≤1 H2O≤2 H2≤1 THC≤3
Oxygen (O2) 99.995% Ar≤20 CO2≤1 N2≤20 THC≤2
Carbon Dioxide (CO2) 99.995% O2≤10 H2O≤5 N2≤20 CO≤1 THC≤10 99.999% O2≤1 H2O≤2 N2≤5 CO≤1 THC≤1
Carbon Monoxide (CO) 99.95% N2<350, O2<50, H2O<5
Sulfur Dioxide (SO2) 99.97% O2+N2<100, H2O<10, <200
Nitrogen Monoxide (NO) 99.5% N2O<4000\NO2<2000\N2<300\CO2<500
Nitrogen Dioxide (NO2) 99.9%
Nitrous Oxide (N2O) 99.99%
Neon (N2) 99.995% H2≤2 N2≤5 He≤40 THC≤1 O2+Ar≤2 H2O≤2 99.999% O2≤1 N2≤5 H2O≤2 He≤10
Krypton (Kr) 99.99% N2≤20 H2≤2 O2+Ar≤5 Xe≤50 H2O≤3 THC≤3 99.999% N2≤3 H2≤0.5 O2+Ar≤2 Xe≤4 H2O≤2.6 THC≤1
Xenon (Xe) 99.99% N2≤20 Ar≤10 N2O≤1 O2≤2 H2≤2 Kr≤50 H2O≤3 THC≤3 99.999%N2≤3 THC≤1 N2O≤0.5 O2+Ar≤2 H2O≤2.6 H2≤0.5 Kr≤4
Sulfureted Hydrogen (H2S) 99.9% H2<200ppm\O2+N2<100ppm\H2O<3ppm
Hydrogen Chloride (HCl) 99.9% Hydrogen Chloride (HCl) 99.99% Hydrogen Chloride (HCl) 99.999% N2≤4, CO2≤5, H2O≤1, O2+Ar≤1, TCH≤1
Liquid Chlorine (Cl2) 99.9% CO2<400\CO10\H2<200, N2<100\O2<20\H2O<100 99.999%
Ammonia (NH3) 99% 99.999% O2<1.0ppm\N2<2.0ppm\CO1.0ppmH2O<2.0ppm THC(C1~C3)<1.0ppm
Sulfur hexafluoride (SF6) 99.95% O2≤10 H2O≤5 N240 HF≤0.1 CF4≤25
Synthetic Air (O2: 19.5-22.5)H2O≤5 CO/CO2≤0.5 THC≤5 Zero Air (O2: 19.5-22.5) H2O≤5 CO/CO2≤0.5 THC≤0.1
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